Calcium fluoride (CaF₂) optical components exhibit high UV transmittance and are potentially ideal materials for inertial confinement fusion devices. However, it is difficult to achieve high-precision, high-efficiency, and high-quality machining due to its brittleness. For this reason, we developed a laminated composite lapping tool. First, a laminated lapping tool with an outer layer of porous diamond hard abrasive (with lubricant: graphene oxide GO) and an inner layer of calcite soft abrasive was fabricated via a gel method in a microgravity environment. The microstructure, flexural strength and compressive strength of the laminated composite lapping tool were analysed. The innovative Ar plasma dressing process was adopted to achieve trimming and accelerated shedding of the porous diamond abrasive layer by leveraging the etching differential between the porous diamond and the binder. The synergistic lapping mechanism and lapping efficiency of the laminated composite lapping tool were elucidated through lapping experiments. The results showed that the lapping tool lubricity was significantly improved when the GO content was between 0.5 and 0.7 wt%. The surface roughness (Sa) of calcium fluoride after lapping by the laminated composite lapping tool reached 5.5 nm and 1.1 nm, and the lapping time was 30 min and 60 min, respectively. This method integrates ultra-precision grinding, lapping, and polishing into a single process, effectively avoiding clamping errors during workpiece repositioning. These findings are useful for the development of high-quality composite lapping tools and improve the processing quality of optical components.
周老师: 13321314106
王老师: 17793132604
邮箱号码: lub@licp.cas.cn