TiVCrMoWN, ZrVCrHfWN, and ZrVCrMoWN high-entropy coatings with varying lattice size differences were deposited via high-power impulse magnetron sputtering and investigated concerning mechanical and tribological properties. Elevated nitrogen partial pressure (≥0.15 Pa) results in a single-phase cubic structure for the investigated coatings. Cubic ZrVCrHfWN and ZrVCrMoWN nitrides demonstrate higher hardness compared to TiVCrMoWN owing to the greater lattice size differences. Whereas the development of tribolayers in Mo-containing TiVCrMoWN and ZrVCrMoWN coatings improves the room-temperature wear resistance, exhibiting reduced friction coefficients and wear rates relative to ZrVCrHfWN. The wear resistance of TiVCrMoWN progressively decreases from room temperature to 400 °C. In comparison, the superior mechanical stability of ZrVCrMoWN facilitates the persistent presence of the tribolayer, hence augmenting wear resistance at 400 °C.